| 167540000202 | 2026 | 2027 | | 0010 | 498,000 | 558,000 | 1,056,000 | 0 | 498,000 | 558,000 | 1,056,000 | |
| 167540000202 | 2025 | 2026 | | 0010 | 498,000 | 550,000 | 1,048,000 | 0 | 498,000 | 550,000 | 1,048,000 | |
| 167540000202 | 2024 | 2025 | | 0010 | 456,000 | 560,000 | 1,016,000 | 0 | 456,000 | 560,000 | 1,016,000 | |
| 167540000202 | 2023 | 2024 | | 0010 | 476,000 | 493,000 | 969,000 | 0 | 476,000 | 493,000 | 969,000 | |
| 167540000202 | 2022 | 2023 | | 0010 | 529,000 | 606,000 | 1,135,000 | 0 | 529,000 | 606,000 | 1,135,000 | |
| 167540000202 | 2021 | 2022 | | 0010 | 424,000 | 484,000 | 908,000 | 0 | 424,000 | 484,000 | 908,000 | |
| 167540000202 | 2020 | 2021 | | 0010 | 369,000 | 419,000 | 788,000 | 0 | 369,000 | 419,000 | 788,000 | |
| 167540000202 | 2019 | 2020 | | 0010 | 371,000 | 444,000 | 815,000 | 0 | 371,000 | 444,000 | 815,000 | |
| 167540000202 | 2018 | 2019 | | 0010 | 373,000 | 454,000 | 827,000 | 0 | 373,000 | 454,000 | 827,000 | |
| 167540000202 | 2017 | 2018 | | 0010 | 325,000 | 396,000 | 721,000 | 0 | 325,000 | 396,000 | 721,000 | |
| 167540000202 | 2016 | 2017 | | 0010 | 218,000 | 425,000 | 643,000 | 0 | 218,000 | 425,000 | 643,000 | |
| 167540000202 | 2015 | 2016 | | 0010 | 202,000 | 392,000 | 594,000 | 0 | 202,000 | 392,000 | 594,000 | |
| 167540000202 | 2014 | 2015 | | 0010 | 180,000 | 343,000 | 523,000 | 79,000 | 180,000 | 343,000 | 523,000 | |
| 167540000202 | 2013 | 2014 | | 0010 | 165,000 | 226,000 | 391,000 | 0 | 165,000 | 226,000 | 391,000 | |
| 167540000202 | 2012 | 2013 | | 0010 | 165,000 | 162,000 | 327,000 | 0 | 165,000 | 162,000 | 327,000 | |
| 167540000202 | 2011 | 2012 | | 0010 | 165,000 | 188,000 | 353,000 | 0 | 165,000 | 188,000 | 353,000 | |
| 167540000202 | 2010 | 2011 | | 0010 | 154,000 | 236,000 | 390,000 | 0 | 154,000 | 236,000 | 390,000 | |
| 167540000202 | 2009 | 2010 | | 0010 | 154,000 | 236,000 | 390,000 | 0 | 154,000 | 236,000 | 390,000 | |
| 167540000202 | 2008 | 2009 | | 0010 | 182,000 | 268,000 | 450,000 | 0 | 182,000 | 268,000 | 450,000 | |
| 167540000202 | 2007 | 2008 | | 0010 | 166,000 | 244,000 | 410,000 | 0 | 166,000 | 244,000 | 410,000 | |
| 167540000202 | 2006 | 2007 | | 0010 | 150,000 | 212,000 | 362,000 | 0 | 150,000 | 212,000 | 362,000 | |
| 167540000202 | 2005 | 2006 | | 0010 | 141,000 | 200,000 | 341,000 | 0 | 141,000 | 200,000 | 341,000 | |
| 167540000202 | 2004 | 2005 | | 0010 | 130,000 | 184,000 | 314,000 | 0 | 130,000 | 184,000 | 314,000 | |
| 167540000202 | 2003 | 2004 | | 0010 | 126,000 | 178,000 | 304,000 | 0 | 126,000 | 178,000 | 304,000 | |
| 167540000202 | 2002 | 2003 | | 0010 | 118,000 | 166,000 | 284,000 | 0 | 118,000 | 166,000 | 284,000 | |
| 167540000202 | 2001 | 2002 | | 0010 | 112,000 | 156,000 | 268,000 | 0 | 112,000 | 156,000 | 268,000 | |
| 167540000202 | 2000 | 2001 | | 0010 | 99,000 | 157,000 | 256,000 | 0 | 99,000 | 157,000 | 256,000 | |
| 167540000202 | 1999 | 2000 | | 0010 | 95,000 | 133,000 | 228,000 | 0 | 95,000 | 133,000 | 228,000 | |
| 167540000202 | 1998 | 1999 | | 0010 | 85,000 | 119,000 | 204,000 | 0 | 85,000 | 119,000 | 204,000 | |
| 167540000202 | 1997 | 1998 | | 0010 | 0 | 0 | 0 | 0 | 85,000 | 110,000 | 195,000 | |
| 167540000202 | 1996 | 1997 | | 0010 | 0 | 0 | 0 | 0 | 67,200 | 104,600 | 171,800 | |
| 167540000202 | 1995 | 1996 | | 0010 | 0 | 0 | 0 | 0 | 67,200 | 104,600 | 171,800 | |
|